The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
May. 31, 2021
Vienex Corporation, Kanonji, JP;
Yukihiro Kagawa, Kanonji, JP;
Osamu Iwasaki, Kanonji, JP;
VIENEX CORPORATION, Kagawa, JP;
Abstract
According to the present invention, a light source and one pixel unit formed of at least one light reception element among a light reception element array (photodiode array) are provided in a one-to-one correspondence, and a light beam is detected from at least one light reception element (one pixel unit) corresponding to the light source, only when the light source emits light. Therefore, only one collimated or further substantially condensed light beam is incident into 'a foreign substance/defect' in an object to be inspected, and only scattered light can be separated by the light reception element and be detected. Accordingly, even when an object to be inspected has a light scattering property and is thick, “a foreign substance/defect” can be detected with a good signal to noise ratio (crosstalk is extremely low).