The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2025

Filed:

Mar. 29, 2023
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Hiroshi Morikazu, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/53 (2013.12); B23K 26/364 (2013.12); H01L 21/268 (2005.12); H01L 21/304 (2005.12); H01L 21/78 (2005.12); B23K 103/00 (2005.12);
U.S. Cl.
CPC ...
B23K 26/53 (2015.09); H01L 21/268 (2012.12); B23K 2103/56 (2018.07);
Abstract

A laser processing method includes forming a first processing mark to form an origin of dividing or a dividing groove with a laser beam in a first direction, and forming a second processing mark by forming an origin of dividing or a dividing groove with the laser beam in a second direction that intersects the first direction. An unprocessed region in which the processing is not executed remains at an intersection at which the first direction and the second direction intersect each other. The method further includes processing the unprocessed region. The unprocessed region processing step forms a coupling processing mark that couples the first processing mark and the second processing mark to each other to form an origin of dividing or a dividing groove with the laser beam in a direction arising from setting an inclination with respect to the first direction or the second direction.


Find Patent Forward Citations

Loading…