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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12289999 B1

PDFFull Text
Date of Patent:
Apr. 29, 2025

Filed:

Jul. 30, 2021

High density multi-poled thin film piezoelectric devices and methods of making the same

Applicant:

Exo Imaging, Inc., Redwood City, CA (US);

Inventors:

Brian Bircumshaw, Oakland, CA (US);

Sandeep Akkaraju, Wellesley, MA (US);

Assignee:

Exo Imaging, Inc., Santa Clara, CA (US);

Attorney:

Morgan, Lewis & Bockius LLP

Primary Examiner:

Emily P Pham

Assistant Examiner:

Monica Mata

Int. Cl.
CPC ...
H01L 41/047 (2005.12); H01L 41/314 (2012.12); H01L 41/332 (2012.12); H10N 30/074 (2022.12); H10N 30/082 (2022.12); H10N 30/87 (2022.12);
U.S. Cl.
CPC ...
H10N 30/874 (2023.01); H10N 30/074 (2023.01); H10N 30/082 (2023.01); H10N 30/877 (2023.01);
Abstract

Disclosed are multi-poled piezoelectric devices with improved packing density and methods for making such multi-poled piezoelectric devices with improved packing density. The multi-poled piezoelectric devices comprise: a) a top electrode, a piezoelectric layer, and a bottom electrode fabricated on a substrate; b) vias generated by etching the piezoelectric layer, the top electrode, or both; and c) a re-distribution layer (RDL) deposited over one or more of: the top electrode, the piezoelectric layer, the bottom electrode, or the one or more vias.

Find Patent Forward Citations

Bircumshaw, Brian. (2025). High density multi-poled thin film piezoelectric devices and methods of making the same (U.S. Patent No. 12289999). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12289999

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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