The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Jul. 30, 2021
Applicant:
Exo Imaging, Inc., Redwood City, CA (US);
Inventors:
Brian Bircumshaw, Oakland, CA (US);
Sandeep Akkaraju, Wellesley, MA (US);
Assignee:
Exo Imaging, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2005.12); H01L 41/314 (2012.12); H01L 41/332 (2012.12); H10N 30/074 (2022.12); H10N 30/082 (2022.12); H10N 30/87 (2022.12);
U.S. Cl.
CPC ...
H10N 30/874 (2023.01); H10N 30/074 (2023.01); H10N 30/082 (2023.01); H10N 30/877 (2023.01);
Abstract
Disclosed are multi-poled piezoelectric devices with improved packing density and methods for making such multi-poled piezoelectric devices with improved packing density. The multi-poled piezoelectric devices comprise: a) a top electrode, a piezoelectric layer, and a bottom electrode fabricated on a substrate; b) vias generated by etching the piezoelectric layer, the top electrode, or both; and c) a re-distribution layer (RDL) deposited over one or more of: the top electrode, the piezoelectric layer, the bottom electrode, or the one or more vias.