The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Jul. 20, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Luguang Wang, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
Embodiments of the disclosure disclose a semiconductor device and a method manufacturing thereof. The semiconductor device includes a substrate as well as a first groove and a second groove located in the substrate, in which the second groove is formed by etching the substrate downwards from part of a bottom surface of the first groove, and a sidewall of the second groove retracts inward by a preset length relative to a sidewall of the first groove; a word layer including a first sub-portion located in the second groove and a second sub-portion located in the first groove, in which a gap is provided between a sidewall of the second sub-portion and that of the first groove; and a word line cover layer located in the first groove and covering the second sub-portion, in which an air gap structure at least located at the gap is provided in the word line cover layer.