The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2025

Filed:

Jul. 22, 2022
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventor:

Mark T. Bohr, Aloha, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2005.12); H01L 29/04 (2005.12); H01L 29/06 (2005.12); H01L 29/08 (2005.12); H01L 29/161 (2005.12); H01L 29/165 (2005.12); H01L 29/167 (2005.12); H01L 29/66 (2005.12); H01L 21/84 (2005.12); H01L 29/737 (2005.12);
U.S. Cl.
CPC ...
H01L 29/7848 (2012.12); H01L 29/045 (2012.12); H01L 29/0653 (2012.12); H01L 29/0847 (2012.12); H01L 29/161 (2012.12); H01L 29/165 (2012.12); H01L 29/167 (2012.12); H01L 29/66545 (2012.12); H01L 29/66628 (2012.12); H01L 29/66636 (2012.12); H01L 29/66795 (2012.12); H01L 29/7834 (2012.12); H01L 29/785 (2012.12); H01L 29/7851 (2012.12); H01L 21/845 (2012.12); H01L 29/7378 (2012.12);
Abstract

A semiconductor device having tipless epitaxial source/drain regions and a method for its formation are described. In an embodiment, the semiconductor device comprises a gate stack on a substrate. The gate stack is comprised of a gate electrode above a gate dielectric layer and is above a channel region in the substrate. The semiconductor device also comprises a pair of source/drain regions in the substrate on either side of the channel region. The pair of source/drain regions is in direct contact with the gate dielectric layer and the lattice constant of the pair of source/drain regions is different than the lattice constant of the channel region. In one embodiment, the semiconductor device is formed by using a dielectric gate stack placeholder.


Find Patent Forward Citations

Loading…