The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Mar. 16, 2022
Carl Zeiss Microscopy Gmbh, Jena, DE;
Dirk Preikszas, Oberkochen, DE;
Michael W. Phaneuf, Ottawa, CA;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
The invention relates to a particle beam device () for imaging, analyzing and/or processing an object (). The particle beam device () comprises a first particle beam generator () for generating a first particle beam, wherein the first particle beam generator () has a first generator beam axis (), wherein an optical axis (OA) of the particle beam device () and the first generator beam axis () are identical; a second particle beam generator () for generating a second particle beam, wherein the second particle beam generator () has a second generator beam axis (), wherein the optical axis (OA) and the second generator beam axis () are arranged at an angle being different from 0° and 180°; a deflection unit () for deflecting the second particle beam from the second generator beam axis () to the optical axis (OA) and along the optical axis (OA), wherein the deflection unit () has a first opening () and a second opening () being different from the first opening (), wherein the optical axis (OA) runs through the first opening (), wherein the second generator beam axis () runs through the second opening (); an objective lens () for focusing the first particle beam or the second particle beam onto the object (), wherein the optical axis (OA) runs through the objective lens (); and at least one detector () for detecting interaction particles and/or interaction radiation.