The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Nov. 12, 2021
Asml Netherlands B.v., Veldhoven, NL;
Stef Marten Johan Janssens, Eindhoven, NL;
Koen Cuypers, Lommel, BE;
Rogier Hendrikus Magdalena Cortie, Breda, NL;
Sudhir Srivastava, Eindhoven, NL;
Theodorus Johannes Antonius Renckens, Breda, NL;
Jeroen Gerard Gosen, Mountain View, CA (US);
Erik Henricus Egidius Catharina Eummelen, Veldhoven, NL;
Hendrikus Johannes Schellens, Bergeijk, NL;
Adrianus Marinus Wouter Heeren, Veldhoven, NL;
Bo Lenssen, Belfeld, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.