The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2025

Filed:

Jul. 23, 2021
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chieh Hsu, Hsinchu, TW;

Guancyun Li, Hsinchu, TW;

Ching-Jung Chang, Hsinchu, TW;

Chi-Feng Tung, Hsinchu, TW;

Hsiang-Yin Shen, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G 43/02 (2005.12); B61B 3/00 (2005.12); G01B 21/22 (2005.12); G01C 9/06 (2005.12); G01H 1/00 (2005.12); H01L 21/677 (2005.12);
U.S. Cl.
CPC ...
B65G 43/02 (2012.12); B61B 3/00 (2012.12); G01B 21/22 (2012.12); G01C 9/06 (2012.12); G01H 1/00 (2012.12); H01L 21/67703 (2012.12); H01L 21/6773 (2012.12); H01L 21/67733 (2012.12); B65G 2201/0297 (2012.12);
Abstract

An overhead transport system is provided capable of absorbing abnormal vibration and determining a source of the abnormal vibration. The overhead transport system in accordance with various embodiments of the present disclosure includes a processor, an overhead rail, a plurality of hangers that support the overhead rail, a vibration meter measuring vibration from the overhead rail, and a damper included in each of the hangers. The processor is configured to change a property of the damper in response to a determination that the measured vibration by the vibration meter is indicative of an abnormal vibration.


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