The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Jul. 21, 2020
Ebara Corporation, Tokyo, JP;
Taro Takahashi, Tokyo, JP;
Yuta Suzuki, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
An end point detection method is provided for detecting and end point based on a drive current supplied to a drive unit that rotates and drives one of a polishing table and a holding unit. The end point detection method includes: a step (S) of determining whether a polishing condition of a polishing process to be executed coincides with a preset specific polishing condition; a step (S) of adjusting a current control parameter in a drive control unit that controls the drive current, the current control parameter related to a change in the drive current with respect to a change in a driving load of the drive unit, if it is determined that the polishing condition coincides with the specific polishing condition; and a step (S) of detecting the drive current supplied to the drive unit based on the adjusted current control parameter.