The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Feb. 04, 2024
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Aryan Afzalian, Chastre, BE;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method includes the following steps. A substrate is etched, forming a core structure protruding out of a plane of the substrate. Shallow trench isolation (STI) features are formed on opposite sides of the core structure. The substrate and a lower portion of the core structure are doped to form a first source/drain region with a first doping concentration. A barrier layer is grown on an upper portion of the core structure. A first spacer is formed covering the STI features and covering the lower portion of core structure. A shell is formed wrapping the upper portion of the core structure and the barrier layer. The shell and the upper portion of the core structure have different doping conductivity types. A second source/drain region is formed with a second doping concentration over the shell. The first doping concentration and the second doping concentration are different from each other.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile