The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2025

Filed:

Apr. 22, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Ming-Fa Chen, Taichung, TW;

Hsien-Wei Chen, Hsinchu, TW;

Sung-Feng Yeh, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/065 (2022.12); H01L 21/66 (2005.12); H01L 23/00 (2005.12); H01L 23/31 (2005.12); H01L 25/00 (2005.12);
U.S. Cl.
CPC ...
H01L 25/0655 (2012.12); H01L 22/14 (2012.12); H01L 23/3128 (2012.12); H01L 24/24 (2012.12); H01L 25/50 (2012.12); H01L 2224/24225 (2012.12);
Abstract

A semiconductor structure includes a first die, a dielectric layer, a second interconnection structure, a second conductive pad and a conductive feature. The first die includes a first interconnection structure over a first substrate and a first conductive pad disposed on and electrically connected to the first interconnection structure. The first conductive pad has a probe mark on a surface thereof. The dielectric layer laterally warps around the first die. The second interconnection structure is disposed on the first die and the dielectric layer, the second interconnection structure includes a conductive via landing on the first conductive pad of the first die, and the conductive via is spaced apart from the first probe mark. The second conductive pad is disposed on and electrically connected to the second interconnection structure. The conductive feature is disposed on the second conductive pad.


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