The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2025

Filed:

Dec. 11, 2022
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Andreas Schmaunz, Oberkochen, DE;

Gero Walter, Westhausen, DE;

Bernd Stenke, Illertissen, DE;

Gerald Schmid, Blaustein, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/16 (2005.12); H01J 37/10 (2005.12); H01J 37/317 (2005.12);
U.S. Cl.
CPC ...
H01J 37/16 (2012.12); H01J 37/10 (2012.12); H01J 2237/006 (2012.12); H01J 2237/0492 (2012.12); H01J 2237/166 (2012.12);
Abstract

A gas reservoir that receives a precursor has a gas-receiving unit which is arranged in a first receiving unit of a basic body and a sliding unit which is arranged movably in a second receiving unit of the basic body. The gas-receiving unit has a movable closure unit for opening or closing a gas outlet opening of the gas-receiving unit. In a first position of the sliding unit, a first opening of a sliding-unit line device is fluidically connected to a first basic body opening and a second opening of the sliding-unit line device is fluidically connected to a second basic body opening. In the second position of the sliding unit, the first opening is arranged at an inner wall of the second receiving unit and the second opening is arranged at the movable closure unit.


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