The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
May. 23, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Lakmal C. Kalutarage, San Jose, CA (US);
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
Aaron Dangerfield, San Jose, CA (US);
Feng Q. Liu, San Jose, CA (US);
Mark Saly, Santa Clara, CA (US);
Michael Haverty, Mountain View, CA (US);
Muthukumar Kaliappan, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods of selectively depositing blocking layers on conductive surfaces over dielectric surfaces are described. In some embodiments, a 4-8 membered substituted heterocycle is exposed to a substrate to selectively form a blocking layer. In some embodiments, a layer is selectively deposited on the dielectric surface after the blocking layer is formed. In some embodiments, the blocking layer is removed.