The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
May. 19, 2022
Screen Holdings Co., Ltd., Kyoto, JP;
Yuji Okita, Kyoto, JP;
Hideji Naohara, Kyoto, JP;
Hiroaki Kakuma, Kyoto, JP;
Tatsuya Masui, Kyoto, JP;
Yuichi Deba, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A state detection device includes at least one chuck pin for holding a substrate, a photographing unit configured to photograph the chuck pin, and set at least one image to be obtained as a target image, a matching coordinate calculation unit, namely a data matching calculator, configured to perform matching processing between the target image and a reference image which is at least one image showing the chuck pin, and calculate matching coordinates, which are coordinates indicating a position of the reference image in the target image when a matching score between the reference image and the target image is the highest, and a detection unit, namely a detector, configured to detect an open/closed state of the chuck pin based on the matching coordinates. Therefore, the open/closed state of the chuck pin can be detected while maintaining high detection accuracy.