The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2025

Filed:

Jun. 08, 2023
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Yoshimasa Kojima, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/80 (2017.01); G06T 7/70 (2017.01); H01L 21/67 (2006.01); H04N 23/90 (2023.01);
U.S. Cl.
CPC ...
G06T 7/80 (2017.01); G06T 7/70 (2017.01); H01L 21/67259 (2013.01); H04N 23/90 (2023.01); G06T 2207/30148 (2013.01); G06T 2207/30244 (2013.01);
Abstract

A positioning method includes detecting coordinates (X, Y) of a rotation center on a surface of a holding table with a first image capturing unit and stores the detected coordinates as a new first reference position, detecting coordinates (X, Y) of a rotation center on another surface of the holding table with a second image capturing unit and stores the detected coordinates as a new second reference position, calculating a first deviation between a previous rotation center on the surface of the holding table and the coordinates (X, Y), calculating a second deviation between a previous rotation center on the other surface of the holding table and the coordinates (X, Y), correcting a coordinate system of images captured by the first image capturing unit to eliminate the first deviation, and correcting a coordinate system of images captured by the second image capturing unit to eliminate the second deviation.


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