The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2025

Filed:

Mar. 02, 2021
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Takahiro Iwasaki, Yokohama Kanagawa, JP;

Hirokazu Miyoshi, Kamakura Kanagawa, JP;

Shogo Aso, Yokohama Kanagawa, JP;

Masayuki Hatano, Yokohama Kanagawa, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 33/38 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 33/3842 (2013.01); H01L 21/0271 (2013.01);
Abstract

According to one embodiment, an imprint template includes a substrate having a first surface and a mesa part protruding from the first surface. The mesa part has a second surface with a pattern thereon. The mesa part includes a sloped region. The sloped region is on at least an outer circumferential portion of the second surface. The second surface in the sloped region slopes downward towards the first surface to an outer edge of the mesa part when the substate is in a non-pressurized state.


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Iwasaki, Takahiro. (2025). Template, manufacturing method of template, and manufacturing method of semiconductor device (U.S. Patent No. 12271111). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12271111

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