The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2025
Filed:
Feb. 22, 2023
Disco Corporation, Tokyo, JP;
Naoki Murazawa, Tokyo, JP;
Kunimitsu Takahashi, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
Apparatus for inspecting the tension of a tape adhered to an annular frame having, in the center thereof, an opening for accommodating a wafer includes: a frame support section that supports the annular frame, a light source that applies light toward the tape, an imaging camera that captures, through the tape, the light applied from the light source, a first polarizing plate disposed between the tape and the light source, and a second polarizing plate disposed between the tape and the imaging camera and positioned so as to shield the light of linearly polarized light transmitted through the first polarizing plate. If distortion is generated in a polarization plane of the light due to application, onto the tape, of the light of the linearly polarized light transmitted through the first polarizing plate, the light is transmitted through the second polarizing plate, and the imaging camera images the transmitted light.