Manufacturing apparatus and manufacturing method for carbon nanotube

Abstract

Provided are a carbon nanotube production device and production method capable of realizing high-temperature heating of a catalyst raw material in a floating catalyst chemical vapor deposition (FCCVD) method, and improving the quality and yield of carbon nanotubes synthesized. A carbon nanotube production deviceincludes a synthesis furnacefor synthesizing carbon nanotubes; a catalyst raw material supplying nozzlefor supplying a catalyst raw material used to synthesize carbon nanotubes to the synthesis furnace; and a nozzle temperature adjusting unitcapable of setting a temperature of an inner portionof the catalyst raw material supplying nozzlehigher than a temperature of a reaction fieldof the synthesis furnace. By supplying to the synthesis furnacethe catalyst raw material that has been thermally decomposed after being heated to a temperate at which a catalyst metal will not yet be condensed, and by having the thermally decomposed catalyst raw material rapidly cooled to a CVD temperature at the synthesis furnace, microscopic catalyst metal particles will be generated at a high density in the space of the reaction fieldsuch that carbon nanotubes having a small diameter can be vapor-grown at a high density.