The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Mar. 02, 2021
Applicant:
Inficon, Inc., East Syracuse, NY (US);
Inventors:
Matan Lapidot, Kfar Menahem, IL;
Mohamed Buhary Rinzan, Manlius, NY (US);
Chunhua Song, Jamesville, NY (US);
Assignee:
INFICON, INC., East Syracuse, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/52 (2006.01); G01B 17/02 (2006.01); G01N 29/04 (2006.01); G01N 29/24 (2006.01); H01J 37/32 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); C23C 16/52 (2013.01); G01B 17/02 (2013.01); G01N 29/041 (2013.01); G01N 29/2443 (2013.01); G01N 29/2462 (2013.01); H01J 37/32963 (2013.01); H01L 21/6719 (2013.01); H01L 22/26 (2013.01); G01N 2291/0231 (2013.01); G01N 2291/02854 (2013.01); G01N 2291/0423 (2013.01); G01N 2291/0426 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/334 (2013.01);
Abstract
A system and method for monitoring a semiconductor process includes a plurality of sensors and a microcontroller. The plurality of sensors are disposed within a process chamber. The microcontroller receives data from the plurality of sensors and measures the uniformity of a semiconductor process based on the data received from the plurality of sensors.