The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
May. 30, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Priyadarshi Panda, Newark, CA (US);
Lei Lian, Fremont, CA (US);
Pengyu Han, San Jose, CA (US);
Todd J. Egan, Fremont, CA (US);
Prashant Aji, San Jose, CA (US);
Eli Mor, Garden City, ID (US);
Alex J. Tom, San Francisco, CA (US);
Leonard Michael Tedeschi, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A cool cluster comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device of the tool cluster. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.