The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
May. 23, 2024
Applicant:
Precitec Optronik Gmbh, Neu-Isenburg, DE;
Inventors:
Stephan Weiß, Rodgau, DE;
Simon Mieth, Frankfurt am Main, DE;
Corinna Weigelt, Langen, DE;
Tobias Beck, Heusenstamm, DE;
Assignee:
PRECITEC OPTRONIK GMBH, Neu-Isenburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02091 (2022.01); G01B 9/02055 (2022.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02091 (2013.01); G01B 9/02072 (2013.04); G01B 11/06 (2013.01);
Abstract
A device for measuring wafers includes an optical coherence tomograph and a scanning device that scans the surface of the wafer successively at a plurality of measuring points. Two measuring points have a distance dof 140 mm≤d≤600 mm. An evaluation unit calculates distance values and/or thickness values from the interference signals provided by the optical coherence tomograph.