The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Jun. 23, 2021
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Sungsil Cho, Anyang-si, KR;
DaHye Kim, Suwon-si, KR;
SooJin Lee, Suwon-si, KR;
Jae Eon Park, HwaSung, KR;
Bryan C. Hendrix, Danbury, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Shawn D. Nguyen, Danbury, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/34 (2006.01); C23C 16/36 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/345 (2013.01); C23C 16/36 (2013.01); C23C 16/45553 (2013.01); C23C 16/52 (2013.01);
Abstract
Provided are certain silicon precursor compounds which are useful in the formation of silicon-containing films in the manufacture of semiconductor devices, and more specifically to compositions and methods for forming such silicon-containing films, such as films comprising silicon dioxide or silicon nitride.