logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12263452 B1

PDFFull Text
Date of Patent:
Apr. 01, 2025

Filed:

Sep. 29, 2021

Gas solution supply device

Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Suguru Ozawa, Tokyo, JP;

Yuji Araki, Tokyo, JP;

Toshifumi Watanabe, Tokyo, JP;

Yoichi Nakagawa, Tokyo, JP;

Risa Kimura, Tokyo, JP;

Tao Xu, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:

Chrisman Gallo Tochtrop LLC

Primary Examiner:

Anshu Bhatia

Int. Cl.
CPC ...
B01F 23/00 (2022.01); B01D 19/00 (2006.01); B01F 23/232 (2022.01); B01F 23/70 (2022.01); B01F 23/80 (2022.01); B01F 25/31 (2022.01); B01F 25/51 (2022.01); B01F 35/221 (2022.01); B01F 35/71 (2022.01); B01F 23/237 (2022.01); B01F 101/58 (2022.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B01F 23/2323 (2022.01); B01D 19/0063 (2013.01); B01D 19/0068 (2013.01); B01F 23/703 (2022.01); B01F 23/803 (2022.01); B01F 25/31 (2022.01); B01F 25/51 (2022.01); B01F 35/2211 (2022.01); B01F 35/7176 (2022.01); B01F 35/718051 (2022.01); B01F 23/237613 (2022.01); B01F 2101/58 (2022.01); H01L 21/02041 (2013.01);
Abstract

A gas solution supply deviceincludes: a first gas-liquid separatorin which gas solution is stored; a second gas-liquid separatorprovided at a stage subsequent to the first gas-liquid separatorand in which gas solution to be supplied to a use point is stored; an intermediate lineprovided between the first gas-liquid separatorand the second gas-liquid separator; a pressure booster pumpprovided on the intermediate lineand increases a pressure of gas solution being supplied from the first gas-liquid separatorto the second gas-liquid separator; a gas supply linethat supplies gas as a material of the gas solution; and a gas dissolving unitprovided on the intermediate lineand dissolves the gas supplied from the gas supply linein the gas solution supplied from the first gas-liquid separator

Find Patent Forward Citations

Loading…