The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2025
Filed:
May. 30, 2023
Kioxia Corporation, Tokyo, JP;
Kanto Denka Kogyo Co., Ltd., Tokyo, JP;
Takaya Ishino, Yokkaichi, JP;
Toshiyuki Sasaki, Yokkaichi, JP;
Mitsuharu Shimoda, Shibukawa, JP;
Hisashi Shimizu, Shibukawa, JP;
KIOXIA CORPORATION, Tokyo, JP;
KANTO DENKA KOGYO CO., LTD., Tokyo, JP;
Abstract
In one embodiment, a method of manufacturing a semiconductor device includes etching a film with etching gas that includes a chain hydrocarbon compound expressed as CHFwhere C, H and F respectively denote carbon, hydrogen and fluorine, 'x' denotes an integer of three or more, and “y” and “z” respectively denote integers of one or more. Furthermore, the CHFis the chain hydrocarbon compound in which each of terminal carbon atoms on a carbon chain of the chain hydrocarbon compound is bonded only to fluorine atoms out of hydrogen and fluorine atoms.