The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2025
Filed:
Sep. 13, 2023
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Hiroyuki Shinozaki, Tokyo, JP;
Yasuyuki Motoshima, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 17/08 (2006.01); B24B 1/04 (2006.01); B24B 37/005 (2012.01); B24B 37/07 (2012.01); B24B 37/10 (2012.01); B24B 37/16 (2012.01); B24B 37/26 (2012.01); B24B 53/017 (2012.01); B24B 53/12 (2006.01);
U.S. Cl.
CPC ...
B24B 37/16 (2013.01); B24B 1/04 (2013.01); B24B 17/08 (2013.01); B24B 37/005 (2013.01); B24B 37/07 (2013.01); B24B 37/10 (2013.01); B24B 37/26 (2013.01); B24B 53/017 (2013.01); B24B 53/12 (2013.01);
Abstract
A method is provided and includes making a polishing table and a dummy disk rotate; bringing the dummy disk into contact with a table surface of the polishing table while a liquid is supplied to the table surface; measuring heights of the table surface at a plurality of measurement points while the dummy disk is moved on the table surface; and creating a table profile showing tilt of the table surface from measurement values of the heights of the table surface.