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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12255087 B1

PDFFull Text
Date of Patent:
Mar. 18, 2025

Filed:

Nov. 29, 2022

Expanding apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Tomohito Matsuda, Tokyo, JP;

Yuhei Fujii, Tokyo, JP;

Naoya Takesue, Tokyo, JP;

Takayuki Masada, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain Ltd.

Primary Examiner:

Jason L Vaughan

Assistant Examiner:

Amanda Kreiling

Int. Cl.
CPC ...
H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01);
Abstract

An expanding apparatus includes a frame fixing part that fixes an annular frame of a workpiece unit, a holding table that holds a workpiece, an expanding unit that expands a sheet, a heating unit that heats the sheet between an outer circumferential side of the workpiece and an inner circumferential edge of the annular frame, and a cover that covers the workpiece held by the holding table. The cover covers the workpiece when the sheet is heated by the heating unit.

Find Patent Forward Citations

Matsuda, Tomohito. (2025). Expanding apparatus (U.S. Patent No. 12255087). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12255087

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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