The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Mar. 10, 2022
Applicant:
Innoscience (Suzhou) Semiconductor Co., Ltd., Suzhou, CN;
Inventor:
Xudong Zhu, Suzhou, CN;
Assignee:
INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD., Suzhou, CN;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); H01L 21/67346 (2013.01);
Abstract
A wafer holder includes a carrier plate, and blocking devices. The carrier plate includes a base and a guiding structure. The base has a carrier surface. The guiding structure surrounds the base. The blocking devices are coupled to the carrier plate through the guiding structure, and the blocking devices are configured to move along the guiding structure. Each of the blocking devices has a curved wall, and the curved walls at least partially surrounds an area above the carrier surface.