The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Mar. 29, 2021
Carl Zeiss Multisem Gmbh, Oberkochen, DE;
Dirk Zeidler, Oberkochen, DE;
Christof Riedesel, Aalen, DE;
Arne Thoma, Aalen, DE;
Georgo Metalidis, Koenigsbronn-Zang, DE;
Joerg Jacobi, Herbrechtingen, DE;
Stefan Schubert, Oberkochen, DE;
Ralf Lenke, Lauchheim, DE;
Ulrich Bihr, Kirchheim/Dirgenheim, DE;
Yanko Sarov, Aalen, DE;
Georg Kurij, Aalen, DE;
Carl Zeiss MultiSEM GmbH, Oberkochen, DE;
Abstract
A method of operating a multi-beam particle beam system includes: generating a multiplicity of particle beams such that they each pass through multipole elements that are either intact or defective; focusing the particle beams in a predetermined plane; determining excitations for the deflection elements of the multipole elements; exciting the deflection elements of the multipole elements that are intact with the determined excitations; modifying the determined excitations for the deflection elements of the multipole elements that are defective; and exciting the deflection elements of the defective multipole elements with the modified excitations. Modifying the determined excitations includes adding corrective excitations to the determined excitations. The corrective excitations are the same for all deflection elements of the defective multipole element.