The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Nov. 19, 2020
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Chwen Yu, Taipei, TW;
Chih-Chiang Tseng, Xinfeng Township, TW;
Yi-Chung Lai, Hsinchu County, TW;
Tzu-Sou Chuang, Hsinchu, TW;
Yun-Ju Chia, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/04 (2012.01); B01D 63/06 (2006.01); B01D 63/08 (2006.01); B01D 65/02 (2006.01); B01D 67/00 (2006.01); B01D 69/02 (2006.01); B01D 69/12 (2006.01); B01D 69/14 (2006.01); B01D 71/02 (2006.01); B01D 71/26 (2006.01); B01D 71/52 (2006.01); C04B 38/00 (2006.01); C04B 41/00 (2006.01); C04B 41/48 (2006.01); C04B 41/83 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B24B 37/044 (2013.01); B01D 63/06 (2013.01); B01D 63/082 (2013.01); B01D 65/02 (2013.01); B01D 67/0079 (2013.01); B01D 69/02 (2013.01); B01D 69/1216 (2022.08); B01D 69/1411 (2022.08); B01D 71/025 (2013.01); B01D 71/261 (2022.08); B01D 71/5222 (2022.08); C04B 38/0009 (2013.01); C04B 41/009 (2013.01); C04B 41/48 (2013.01); C04B 41/83 (2013.01); H01L 21/67017 (2013.01); B01D 2321/04 (2013.01); B01D 2325/0283 (2022.08); B01D 2325/04 (2013.01);
Abstract
A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane made of a ceramic material, and a plurality of through holes. The base membrane is coated with a coating material.