The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Jun. 23, 2020
Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;
Semiconductor Energy Laboratory Co., Ltd., Kanagawa-ken, JP;
Abstract
A semiconductor device having a large storage capacity per unit area is provided. The semiconductor device includes a first insulator including a first opening; a first conductor including a second opening over the first insulator; a second insulator including a third opening over the first conductor; a third insulator provided along a first side surface of the first opening, a second side surface of the second opening, and a third side surface of the third opening; an oxide provided along the first side surface, the second side surface, and the third side surface with the third insulator therebetween; a second conductor provided at the first side surface with the third insulator and the oxide therebetween; and a third conductor provided at the third side surface with the third insulator and the oxide therebetween, the oxide includes a first region in the first opening, a second region in the second opening, and a third region in the third opening, and the second region has higher resistance than the first region and the third region.