The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Jul. 18, 2023
Asml Netherlands B.v., Veldhoven, NL;
Niek Jacobus Johannes Roset, Eindhoven, NL;
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
Simon Karel Ravensbergen, Veldhoven, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
Gijs Kramer, Nijmegen, NL;
Roger Anton Marie Timmermans, Nederweert, NL;
Frank Pieter Albert Van Den Berkmortel, Deurne, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.