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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12249527 B1

PDFFull Text
Date of Patent:
Mar. 11, 2025

Filed:

May. 04, 2022

Substrate transport apparatus and substrate transport method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Isamu Taoda, Nirasaki, JP;

Toshiaki Kodama, Nirasaki, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Armstrong Teasdale LLP

Primary Examiner:

Adam R Mott

Assistant Examiner:

Joseph Anthony Trias

Int. Cl.
CPC ...
H01L 21/68 (2006.01); G01S 15/08 (2006.01); G01S 15/88 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); G01S 15/08 (2013.01); G01S 15/88 (2013.01); H01L 21/67196 (2013.01); H01L 21/67706 (2013.01); H01L 21/6773 (2013.01); H01L 21/67745 (2013.01); H01L 21/67766 (2013.01);
Abstract

A substrate transport apparatus includes: a support configured to support a substrate; a moving mechanism configured to move the support in a lateral direction in order to transport the substrate from a first placement portion to a second placement portion, each of the first placement portion and the second placement portion being configured to place thereon the substrate; and an ultrasonic sensor provided on the support and configured to detect the substrate placed on the first placement portion.

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Quick Actions:

Taoda, Isamu. (2025). Substrate transport apparatus and substrate transport method (U.S. Patent No. 12249527). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12249527

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