The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Apr. 23, 2024
Asml Netherlands B.v., Veldhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Jing Zhang, Eindhoven, NL;
Martijn Petrus Christianus Van Heumen, Santa Clara, CA (US);
Patriek Adrianus Alphonsus Maria Bruurs, Baarle-Nassau, NL;
Erheng Wang, San Jose, CA (US);
Vineet Sharma, San Jose, CA (US);
Makfir Sefa, San Jose, CA (US);
Shao-Wei Fu, San Jose, CA (US);
Simone Maria Scolari, Eindhoven, NL;
Johannes Andreas Henricus Maria Jacobs, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.