The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2025

Filed:

Jul. 31, 2020
Applicant:

Showa Denko Materials Co., Ltd., Tokyo, JP;

Inventor:

Yuki Arai, Tokyo, JP;

Assignee:

RESONAC CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/24 (2010.01);
U.S. Cl.
CPC ...
G01Q 60/24 (2013.01);
Abstract

A surface analysis method according to an embodiment includes: acquiring a force curve corresponding to measurement of a sample surface by a scanning probe microscope; calculating a physical quantity of an organic material forming the sample surface based on the force curve, for each of an observation point group; and outputting analysis data indicating the physical quantity of each of the observation point group. The acquiring the force curve includes acquiring the force curve at each of a plurality of observation points on a Y-column extending along a X-direction (a direction along which the probe reciprocates with respect to a stage). The calculating the physical quantity includes: generating a force curve matrix indicating the force curve at each of the plurality of observation points; and calculating the physical quantity at each of the plurality of observation points using the force curve matrix.


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