The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Jul. 09, 2024
Rigaku Corporation, Akishima, JP;
RIGAKU CORPORATION, Tokyo, JP;
Abstract
An X-ray fluorescence spectrometer includes: a vacuum chamber () configured to be evacuated including at least a detection chamber in which a detector is disposed; drive units (A toH) each including a drive source outside the vacuum chamber (), and configured to perform a mechanical operation in the vacuum chamber (); and a vacuum leakage location identification unit (A,B) configured to: operate the drive units (A toH) one at a time while monitoring a degree of vacuum in the vacuum chamber (); if the change in the degree of vacuum in the vacuum chamber () before and after each operation is greater than or equal to a predetermined threshold, identify the relevant one of the drive units (A toH) as a vacuum leakage location; and cause information to that effect to be displayed in a display unit () and/or be recorded in a recording unit ().