The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Jul. 15, 2021
Asm Ip Holding B.v., Almere, NL;
Paul Ma, Scottsdale, AZ (US);
Roghayyeh Lotfi, Scottsdale, AZ (US);
Jaebeom Lee, Tempe, AZ (US);
Eric Christopher Stevens, Tempe, AZ (US);
Charith Eranga Nanayakkara, Tempe, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
Methods for forming transition metal layers on a surface of a substrate are disclosed. Exemplary methods include forming a transition layer prior to forming the transition metal layer. The transition layer can be used to facilitate subsequent deposition of the transition metal layer on high aspect ratio features, while mitigating bending of the features during deposition of the transition metal layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile