The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Sep. 02, 2021
Kioxia Corporation, Tokyo, JP;
Masaki Noguchi, Yokkaichi Mie, JP;
Tatsunori Isogai, Yokkaichi Mie, JP;
Kioxia Corporation, , JP;
Abstract
A semiconductor device includes: a stacked body with insulating layers and conductive layers alternately stacked along a first direction; a semiconductor layer disposed along the first direction in the stacked body; a first insulating film disposed along the first direction between the stacked body and the semiconductor layer; a second insulating film disposed along the first direction between the stacked body and the first insulating layer; a third insulating film disposed along the first direction between the stacked body and the second insulating film; and a fourth insulating film having a first portion and a second portion, the first portion being disposed between the conductive layers and the third insulating film, and the second portion being disposed along a second direction that intersects the first direction between the conductive layer and the insulating layer and being connected to the first portion, and average concentrations of deuterium in the first portion of the fourth insulating film, the third insulating film, the second insulating film, and the first insulating film are lower in an order of the second insulating film>the first insulating film>the first portion>the third insulating film.