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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12237189 B1

PDFFull Text
Date of Patent:
Feb. 25, 2025

Filed:

Nov. 19, 2019

Wafer storage devices configured to measure physical properties of wafers stored therein

Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventor:

Nagasubramaniyan Chandrasekaran, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:

TraskBritt

Primary Examiner:

Tri T Ton

Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01N 21/95 (2006.01); H01L 21/66 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G01N 21/9501 (2013.01); H01L 21/67253 (2013.01); H01L 21/6732 (2013.01); H01L 21/67383 (2013.01); H01L 21/67386 (2013.01); H01L 21/6773 (2013.01); H01L 21/6875 (2013.01); H01L 22/12 (2013.01);
Abstract

A wafer storage device may include one or more mutually aligned rails extending from two opposing side walls, each pair of mutually aligned rails configured to support a wafer between the side walls. The wafer storage device includes one or more sensors coupled to at least some of the one or more rails. The one or more sensors may be configured to detect a physical property of the wafer. The wafer storage device may further include a processor configured to analyze data from the one or more sensors, and a memory device. The memory device may be configured to store data produced by at least the one or more sensors or the processor. The wafer storage device may also include a power storage device configured to receive power from an external source and supply power to the one or more sensors and the processor.

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Chandrasekaran, Nagasubramaniyan. (2025). Wafer storage devices configured to measure physical properties of wafers stored therein (U.S. Patent No. 12237189). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12237189

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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