The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Jun. 09, 2021
Asml Netherlands B.v., Veldhoven, NL;
Asml Holding N.v., Veldhoven, NL;
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Rosmalen, NL;
Koos Van Berkel, Waalre, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Roger Franciscus Mattheus Maria Hamelinck, Breda, NL;
Shahab Shervin, Norwalk, CT (US);
Marinus Augustinus Christiaan Verschuren, Helmond, NL;
Johannes Bernardus Charles Engelen, 'S-Hertogenbosch, NL;
Matthias Kruizinga, Herten, NL;
Tammo Uitterdijk, Wilton, CT (US);
Oleksiy Sergiyovich Galaktionov, Geldrop, NL;
Kjeld Gertrudus Hendrikus Janssen, Nijmegen, NL;
Johannes Adrianus Cornelis Maria Pijnenburg, Moergestel, NL;
Peter Van Delft, Geldrop, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.