The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Jan. 25, 2022
Applicant:
Changxin Memory Technologies, Inc., Hefei, CN;
Inventor:
Chuang Shan, Hefei, CN;
Assignee:
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); G03F 1/36 (2012.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); G03F 1/36 (2013.01); H01L 2223/54426 (2013.01);
Abstract
A method for manufacturing semiconductor mark includes: providing a pattern having a peripheral edge corrected by Optical Proximity Correction (OPC); cutting multiple independent alignment sections from the pattern; and splicing the multiple alignment sections to form a semiconductor mark having a peripheral edge corrected by OPC.