The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Jan. 08, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Luguang Wang, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
Disclosed are a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a base, including a substrate and a dielectric layer, where the substrate includes a front surface and a back surface that are opposite to each other; the dielectric layer is formed on the front surface; the base is provided with a via hole; the via hole penetrates the substrate from the back surface of the substrate and extends to the dielectric layer; an insulating layer, located on an inner wall surface of the via hole; and a conductive structure, where the conductive structure includes a first conductive layer and a second conductive layer connected to each other; the first conductive layer is close to a bottom of the via hole, and the second conductive layer is close to a top of the via hole.