The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Mar. 26, 2021
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Kai Ping Chan, Taichung, TW;
Yen-Yu Chen, Taichung, TW;
Yen Le Lee, Taichung, TW;
Ho Yueh Chen, Taichung, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Abstract
A control system for a wafer transport vehicle is provided. The control system includes a control apparatus, a database, an onboard interface of the wafer transport vehicle and an operation control center. The control apparatus is arranged in a container of the wafer transport vehicle and configured to detect a environmental parameters in a container of the wafer transport vehicle and regulate the internal environment of a container of the wafer transport vehicle. The database is in communication with the control apparatus and configured store the environmental parameters detected by the control apparatus. The onboard interface is in communication with the control apparatus and configured to remotely control the control apparatus. The operation control center is in communication with the control apparatus and the onboard interface of the wafer transport vehicle and configured to receive the environmental parameters detected by the control apparatus.