The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2025

Filed:

May. 26, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Hsien-Chang Hsieh, Hsinchu, TW;

Chun-Chih Lin, Hsinchu, TW;

Tah-te Shih, Hsinchu, TW;

Wen-Hsong Wu, Hsinchu, TW;

Chune-Te Yang, Hsinchu, TW;

Yu-Jen Su, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F01N 13/08 (2010.01); F23J 13/02 (2006.01); F27D 17/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F23J 13/02 (2013.01); F27D 17/002 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); F23J 2900/13001 (2013.01);
Abstract

An exhaust structure includes a piping section, wherein the piping section has a first inner diameter in a central region of the piping section, the piping section has a second diameter in at least one of an inlet or an outlet, and the second diameter has a same value as the first inner diameter. The exhaust structure further includes a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gasses in the piping section.


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