The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Jul. 15, 2024
Nuflare Technology, Inc., Yokohama, JP;
Shingo Mori, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
In an effective temperature calculation method for multi-charged particle beam writing region, at a plurality of observation times which are irradiation end times of a tracking cycle in a time domain in which a beam array region passes through a mesh region of interest, for each of the plurality of unit heat source regions around the mesh region of interest, a temperature rise amount given to the mesh region of interest is determined based on a total irradiation time of the unit heat source region, times since start of irradiation to the unit heat source region to the observation times, and a distance from the unit heat source region to the mesh region of interest, the temperature rise amount is accumulated, and accumulated values corresponding to the plurality of observation times are averaged to calculate an effective temperature of the mesh region of the interest.