The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Jun. 25, 2020
Applicant:
Inficon, Inc., East Syracuse, NY (US);
Inventor:
Mohamed Buhary Rinzan, Manlius, NY (US);
Assignee:
INFICON, INC., East Syracuse, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 14/54 (2006.01); G01B 7/06 (2006.01); G01R 25/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 14/546 (2013.01); G01B 7/066 (2013.01); G01R 25/00 (2013.01);
Abstract
A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the signal matches the crystal frequency.