The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2025

Filed:

Nov. 14, 2019
Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Kazuhiro Sawada, Toyama, JP;

Shunsuke Moriya, Toyama, JP;

Tetsuya Shinjo, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09J 5/04 (2006.01); B32B 7/12 (2006.01); B32B 37/12 (2006.01); B32B 43/00 (2006.01); C09J 125/06 (2006.01); C09J 169/00 (2006.01); C09J 183/04 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
C09J 5/04 (2013.01); B32B 7/12 (2013.01); B32B 37/12 (2013.01); B32B 43/006 (2013.01); C09J 125/06 (2013.01); C09J 169/00 (2013.01); C09J 183/04 (2013.01); H01L 21/6836 (2013.01); B32B 2457/14 (2013.01); C09J 2425/00 (2013.01); C09J 2469/00 (2013.01); C09J 2483/00 (2013.01); H01L 2221/68386 (2013.01);
Abstract

A laminate debonding method includes producing a laminate by joining a first substrate formed of a semiconductor-forming substrate to a second substrate formed of a support substrate which allows passage of infrared laser light, by the mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate, wherein the first adhesive layer is obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and the second adhesive layer is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light; and irradiating the laminate with infrared laser light from a second substrate side for debonding the second substrate at the interface between the first and second adhesive layers.


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