The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2025
Filed:
Mar. 25, 2022
Tencent Technology (Shenzhen) Company Limited, Guangdong, CN;
Suzhou Institute of Nano-tech & Nano-bionics (Sinano), Chinese Academy of Sciences, Jiangsu, CN;
Wenlong Zhang, Guangdong, CN;
Sainan Huai, Guangdong, CN;
Yarui Zheng, Guangdong, CN;
Jiagui Feng, Guangdong, CN;
Kanglin Xiong, Guangdong, CN;
Sunan Ding, Guangdong, CN;
Abstract
This disclosure includes a method for fabricating an air bridge, an air bridge structure, and a superconducting quantum chip, and relates to the field of circuit structures. In some examples, a method for fabricating an air bridge includes forming an air bridge brace structure on a substrate, and forming, on the air bridge brace structure and the substrate, an air bridge material layer with one or more openings in the air bridge material layer that reveal the air bridge brace structure. The air bridge material layer with the one or more openings is formed based on a patterned photoresist layer with patterns corresponding to the one or more openings. The method further includes removing, based on the one or more openings in the air bridge material layer, the air bridge brace structure to obtain the air bridge having the one or more openings.