The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2025
Filed:
Jul. 13, 2021
Asml Netherlands B.v., Veldhoven, NL;
Benjamin Andrew Sams, San Diego, CA (US);
Dietmar Uwe Herbert Trees, San Diego, CA (US);
Vikas Giridhar Telkar, Escondido, CA (US);
Alexander Igorevich Ershov, Escondido, CA (US);
Theodorus Wilhelmus Driessen, San Diego, CA (US);
Serkan Kincal, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A target material supply apparatus includes: first and second fluid flow components () that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket () having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor () can be seated in the gasket.