The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2025
Filed:
Nov. 22, 2022
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
David M. Ermert, Danbury, CT (US);
David Kuiper, Brookfield, CT (US);
Thomas M. Cameron, Newtown, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C07F 7/22 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C07F 7/2284 (2013.01); C23C 16/45553 (2013.01);
Abstract
The invention provides certain organotin compounds which are believed to be useful in the vapor deposition of tin-containing films onto the surface of microelectronic device substrates, as well as in the deposition of EUV-patternable films. Also provided are certain novel precursor compositions. Also disclosed are processes for using the novel precusors to form films.