The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2025

Filed:

Jul. 29, 2021
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;

Inventors:

Chih-Kuo Chang, Hsinchu County, TW;

Cheng-Lung Wu, Zhunan Township, TW;

Ting-Yau Shiu, Taoyuan, TW;

Wei-Chen Lee, Zhubei, TW;

Yang-Ann Chu, Hsinchu, TW;

Jiun-Rong Pai, Jhubei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 9/16 (2006.01); B25J 19/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67706 (2013.01); B25J 9/1664 (2013.01); B25J 9/1697 (2013.01); B25J 19/021 (2013.01); H01L 21/67727 (2013.01); H01L 21/67733 (2013.01);
Abstract

A portable robotic semiconductor pod loader may detect, with at least one sensor, receipt of a semiconductor pod on a load port of the portable robotic semiconductor pod loader. The at least one sensor is supported by the load port. The portable robotic semiconductor pod loader may cause a robot, of the portable robotic semiconductor pod loader, to align with the semiconductor pod provided on the load port. The portable robotic semiconductor pod loader may cause the robot to attach to the semiconductor pod, and may cause the robot to provide the semiconductor pod from the load port to a staging area of a semiconductor processing tool.


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